IS-200
•Low noise linear servo motor, 500mm/sec maximum motor speed. 350mm/sec maximum control speed. 0.1um scan axis resolution.
•Active Scan Area 200mm x 150mm/0.1um encoder resolution
•Footprint: 495(W) x 386(D) x 450(H)mm (Scanner only)

IS-350
•CE certified
•Multiple configurations for wafers, or tray inspection (Dual Channel Data Acquisition)
•350mm x 350mm x 50mm active scan area
•Footprint: 680(W) x 800(D) x 1320(H)mm

IS-500
•Multiple configurations for wafers, or tray inspection (Dual Channel Data Acquisition)
•500mm x 500mm x 50mm active scan area
•Footprint: 970mm(W) x 1140mm(D) x 1,320mm(H) (approx)

C-Scan
•Systems available from 2, 3, 4, 5, 6, 7 and 8 axis scanners, and combinations of servo or stepper motors are available.
•Variable tank sizes from our standard production X, Y, Z, to 3 axis scanner 1950 (X), 2600 (Y), 300 (Z)mm (Open to integration with customers specific inspection requirements-